| 摘要 |
PROBLEM TO BE SOLVED: To obtain a semiconductor testing apparatus by which information on a correction item to be corrected by performing a self-diagnosis and information on a failure unit are displayed and which can be helpful in a proper maintenance treatment. SOLUTION: In a self-diagnostic apparatus, data, for specification, which is required for spefifying a correction item and a failure unit on the basis of a diagnosed result is read out in Step S1, In Step S2, a self-diagnosis is executed regarding respective circuits which constitute a semiconductor testing apparatus. Its diagnosed result is stored (Step S3). Whether all diagnosed results are good or not is judged (Step S4). When even one item is defective, the existence of the correction item is judged on the basis of the data, for specification, which is read out previously (Step S5). In Step S6, a required correction item is corrected. When the diagnosed results are defective in Step S4 even after all necessary corrections, the failure unit is displayed in Step S7. Since the correction item and the failure unit are found, a maintenance operation can be performed easily on the basis of them.
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