发明名称 Semiconductor device having a conductor pattern side face provided with a separate conductive sidewall
摘要 A semiconductor device has a conductive contact buried in a contact hole formed in an insulation film. A conductor pattern is formed on the insulation film and a separate conductive sidewall is formed on a side face of the conductor pattern over or next to the contact buried in the contact hole. The separate conductive sidewall extends on the side face above a top face of the insulation film in a direction away from the top face of the insulation film. This permits the conductor pattern to either be directly in contact with the conductive contact in the contact hole and/or to make good electrical contact with the contact in the contact hole via the separate conductive sidewall.
申请公布号 US6023083(A) 申请公布日期 2000.02.08
申请号 US19980061060 申请日期 1998.04.16
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 TOMITA, KAZUO
分类号 H01L21/768;H01L21/8242;H01L21/8246;H01L27/105;H01L27/108;(IPC1-7):H01L27/108;H01L29/76;H01L29/94 主分类号 H01L21/768
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