摘要 |
PROBLEM TO BE SOLVED: To provide a frequency adjusting method which does not cause deterioration of electrical characteristics of a piezoelectric oscillator due to ion etching used for adjusting the frequency of the piezoelectric oscillator. SOLUTION: For adjusting the frequency of a piezoelectric oscillator, an excitation electrode 1 generated by generating the vapor of a metallic substance in a vacuum and depositing the vapor, the piezoelectric oscillator 2 having the excitation electrode 1 and a specific resonance frequency, drawing lead wires 3 connected to the piezoelectric oscillator 2, a fitting stand 4 for holding the drawing lead wires 3 connected to the piezoelectric oscillator 2, an oscillator 5 for detecting the resonance frequency of the piezoelectric oscillator 2, a switch 6 for switching the connection of the oscillator 5 and the piezoelectric oscillator 2, an ion gun 7 which faces the excitation electrode 1 and ion-etches the excitation electrode 1, and a mask 8 which is arranged in the center of the ion beam of the ion gun 7 and shields the center of the ion beam are used.
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