发明名称 FREQUENCY ADJUSTING METHOD FOR PIEZOELECTRIC OSCILLATOR AND THE PIEZOELECTRIC OSCILLATOR
摘要 PROBLEM TO BE SOLVED: To provide a frequency adjusting method which does not cause deterioration of electrical characteristics of a piezoelectric oscillator due to ion etching used for adjusting the frequency of the piezoelectric oscillator. SOLUTION: For adjusting the frequency of a piezoelectric oscillator, an excitation electrode 1 generated by generating the vapor of a metallic substance in a vacuum and depositing the vapor, the piezoelectric oscillator 2 having the excitation electrode 1 and a specific resonance frequency, drawing lead wires 3 connected to the piezoelectric oscillator 2, a fitting stand 4 for holding the drawing lead wires 3 connected to the piezoelectric oscillator 2, an oscillator 5 for detecting the resonance frequency of the piezoelectric oscillator 2, a switch 6 for switching the connection of the oscillator 5 and the piezoelectric oscillator 2, an ion gun 7 which faces the excitation electrode 1 and ion-etches the excitation electrode 1, and a mask 8 which is arranged in the center of the ion beam of the ion gun 7 and shields the center of the ion beam are used.
申请公布号 JP2000040930(A) 申请公布日期 2000.02.08
申请号 JP19980206442 申请日期 1998.07.22
申请人 TOYO COMMUN EQUIP CO LTD 发明人 KAWAGUCHI YUICHIRO
分类号 H01L21/302;H01L21/3065;H03H3/04;H03H9/02;H03H9/19;(IPC1-7):H03H3/04;H01L21/306 主分类号 H01L21/302
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