发明名称 Method for using photoabsorptive coatings and consumable copper to control exit via redeposit as well as diameter variance
摘要 A method of forming a through-via in a laminated substrate by applying a polymeric photo-absorptive layer on an exposed bottom surface of a laminated substrate. A through-via is laser drilled in the substrate from a top of the substrate through the substrate to a bottom of the substrate. The photo-absorptive layer formed on the bottom surface of the substrate is then removed.
申请公布号 US6023041(A) 申请公布日期 2000.02.08
申请号 US19960747095 申请日期 1996.11.08
申请人 W.L. GORE & ASSOCIATES, INC. 发明人 NODDIN, DAVID B.
分类号 H01L21/48;H01L23/12;H01L23/538;H05K3/00;H05K3/42;H05K3/46;(IPC1-7):B23K26/00 主分类号 H01L21/48
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