SAMPLE HEATING HOLDER FOR ELECTRON MICROSCOPE AND SAMPLE OBSERVING METHOD

摘要

PROBLEM TO BE SOLVED: To suppress drift caused by heating, and to observe a sample with high-resolution at a high-temperature of more 1000 deg.C in a short time with a small current. SOLUTION: A ceramic heater surrounding body 1 coated with carbon on its surface is set around a heater 2 surrounding a sample. The heater surrounding body 1 can be pivoted on pivot screws 5a, 5b. And, slots 17, 20 which FIB (focused ion beams) can pass through are formed in the heater surrounding body 1 and a holder outer frame part 3, so that the sample can be FIB-processed as it being loaded in the holder.