| 摘要 |
<p>PROBLEM TO BE SOLVED: To efficiently and accurately survey spectrum sensitivity. SOLUTION: In a charged particle spectroscope for applying energy rays for excitation to a sample to be analyzed for excitation, observing charged particles being emitted from an area near the surface of the sample 1 due to the excitation by an observation system 30 with a spectroscope 3 for obtaining an energy spectrum, and analyzing elements based on information regarding the peak of the energy spectrum, the spectrum sensitivity of the observation system 30 is measured. An energy spectrum is obtained while the same sample is excited under the same conditions and attention is turned to a specific peak. By applying a bias voltage to the sample and changing the bias voltage, the aimed peak is moved, the traveling track of the top is set to apparent spectrum sensitivity, and further correction considering a refraction phenomenon caused by the application of the bias voltage when charged particles are discharged from the sample is made, thus obtaining original spectrum sensitivity.</p> |
