| 摘要 |
The surface inspection system has a scanning head for scanning the laser bearn along a predetermined scan line across the surface of an article. A collector receives the light reflected from the article surface along the scan line. The collector has a first miror positioned for receiving light reflected from the article surface, a second mirror oriented with respect to the first mirror to receive light reflected from the first mirror, and the first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot. A photodetector is positioned receiving the thus formed spot of light. The method of inspecting the surface of an article includes the steps of scanning a laser beam along a predetermined scan line across the surface of the article, collectively receiving the light reflected from the article surface along the scan line with a plurality of mirrors so as to concentrate the reflected light from a line into a spot.
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