发明名称 |
Method for controlled removal of material from a solid surface |
摘要 |
A catalytic method and an apparatus for selectively removing material from a solid substrate is provided. The method comprises contacting a surface of a solid substrate with a catalyst material in the presence of a reactant under conditions effective to selectively remove material from those areas of said solid substrate in contact with said catalyst material and said reactant.
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申请公布号 |
US6022485(A) |
申请公布日期 |
2000.02.08 |
申请号 |
US19970953478 |
申请日期 |
1997.10.17 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHEEK, ROGER W. |
分类号 |
H01L21/306;H01L21/311;(IPC1-7):H01L21/302;B44C1/22 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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