| 摘要 |
PROBLEM TO BE SOLVED: To prevent the contamination of a lasing gas to avoid deterioration of the laser performance by coating a high-purity coating insulator on ceramic insulators in a laser cavity. SOLUTION: In the chamber of an excimer laser 10, a cathode 18 and anode 20 are located with an electric discharge region 22 formed therebetween. A ceramic main insulator 28 electrically insulates the cathode 18 from the wall of a housing 12, thereby surely causing adequate electric discharge in the discharge region 22. Besides the insulator 28, a ceramic plate 42 is pasted to an upper wall 12 to prevent a current flowing along the surface of the insulator 28 from flying to the upper wall 12. The insulator 28 and plate 42 are coated with a high-purity coating insulator to thereby prevent a harmful reaction with a laser gas due to diffusion of contaminants from ceramic materials.
|
