CONTACT BOARD AND ITS COMPONENT

摘要

PROBLEM TO BE SOLVED: To obtain a contact board which can absorb an irregularity in its height and which can enhance the reliability of its connection. SOLUTION: A membrane ring is a membrane ring which constitutes a part of a contact board which is used to collectively make the burn-in test of many semiconductor devices which are formed on a wafer. It is constituted in such a way that bumps 3 are provided on one face of a membrane 2 which is stretched on the ring and that pads 4 are provided on the other face of the membrane 2. In this case, cutouts 5 are formed on the membrane 2 between the adjacent bumps 3 on the membrane 2.