发明名称 Thin film transistor having an insulating membrane layer on a portion of its active layer
摘要 A thin film transistor and its fabrication method are disclosed wherein the thin film transistor includes a semiconductor substrate, an active layer formed on an upper surface of the semiconductor substrate, a membrane layer formed on a portion of the active layer and defining an offset region in the active layer, a gate insulation layer formed on portions of the membrane layer and the active layer, a gate electrode formed on a portion of the gate insulation layer, and a source region and a drain region formed in the active layer.
申请公布号 US6023087(A) 申请公布日期 2000.02.08
申请号 US19980027899 申请日期 1998.02.23
申请人 LG SEMICON CO., LTD. 发明人 YANG, HAE-CHANG
分类号 H01L21/335;H01L21/28;H01L21/336;H01L29/423;H01L29/786;(IPC1-7):H01L29/786 主分类号 H01L21/335
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