| 摘要 |
PROBLEM TO BE SOLVED: To efficiently execute film forming operation to a substrate. SOLUTION: When a carrying tool by which the substrate to be film-formed is held is carried into a loop-shaped orbit 23 in a vacuum preparing chamber 20, the carrying tool is carried to a roller conveyer 34 provided on a carrying-in orbit 31 in a communication chamber 30 by a roller conveyer 24 in the orbit 23 and is thereafter carried onto a roller conveyer 14 provided in a loop-shaped orbit in a vacuum treating chamber 10. In the vacuum treating chamber 10, the inside is kept vacuum and while the carrying tool is carried by the roller conveyer 14, film formation is executed to the substrate held by the carrying tool. After that, the carrying tool is carried from the vacuum treating chamber 10 onto the roller conveyer 24 of the vacuum preparing chamber 20 from the vacuum treating chamber 10 by a roller conveyer provided on a carrying-away orbit 32 in the communication chamber 30 and is taken out from the vacuum preparing chamber 20. |
