| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the instability of the temperature control by the breakdown of a resistance wire and the dropping of a thermocouple and the delay in correspondence, and enabling performing stable heating and eliminating wasteful changing of the temperature inspecting means without contact to a compressing tool. SOLUTION: Laser lights 20 and 21 from a laser oscillator 6 passing a condenser lens 12 are applied on a compressing tool 4 and heats the tool. The heated compressing tool 4 generates radiated light beams 30, 31, 32 and 33. Since the optical intensities of the radiated light beams 30, 31, 32 and 33 are changed by temperature, the temperature of the compressing tool 4 can be inspected without making contact with the compressing tool 4, by sensing the temperatures of the radiated light beams 30, 31, 32 and 33. Then, the detected temperature is inputted into a control circuit, the current to the laser oscillator 6 is controlled and the laser output is controlled. |
