摘要 |
A sensor of force or viscosity or other attributes of a fluid comprises a mechanical resonator ( 10 ) including an element ( 11; 18; 123 ) of which the stiffness at least partially determines a modal shape of the resonance of the resonator and means ( 21-23 ) for measuring a variation of a measure of the resonance as the stiffness of said element changes. The resonator ( 10 ) may comprise two beams ( 10 a, 10 b; 120, 121 ) connected at or near one end by a yoke ( 12; 122 ) which provides a clamped condition of the resonator at said one end and connected at or near another end by said element. |