| 摘要 |
PURPOSE: The method has an improved process to improve the landing margin without widening the whole width of a black matrix. CONSTITUTION: The method includes; the first step of performing the exposure onto one pattern among a red, a green and a blue pattern, by positioning a mask panel combined body to an exposure board; the second step of performing the exposure onto another pattern among the red, green and blue patterns, by moving the mask panel combined body integer times of a half pitch to the vertical direction of the mask from the reference position of the exposure board; and the third step of performing the exposure onto the remained one pattern among the red, green and blue patterns, by returning the mask panel combined body to the reference position of the exposure board.
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