发明名称 AIR WASHING SYSTEM
摘要 PURPOSE: Air washing system is provided to prevent environment pollution and improve dust collection performance. CONSTITUTION: In the air washing system, the air washing system discharge and filterpowder or floating matters in atmosphere through a back filter, a supporting board is installed in the back filter, many supporting sphere having a inserting hole are formed in the support board, and the back filtering a contaminant is fixed in the inserting hole.
申请公布号 KR20000007323(A) 申请公布日期 2000.02.07
申请号 KR19980026603 申请日期 1998.07.02
申请人 FAIRCHILD KOREA SEMICONDUCTOR LTD. 发明人 PARK, CHANG HWAN
分类号 H01L21/00;(IPC1-7):H01L21/00 主分类号 H01L21/00
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