VAPORIZATION SYSTEM OF LIQUID MATERIAL

摘要

PURPOSE: A vaporization system is provided which has an improved uniformity of a film and reproducibility by regularly supplying a gaseous material into a reactor. CONSTITUTION: Diameter of the first space(16) is larger than that of a supplying tube(12) inducing the liquid material into an injector(14). An outlet having a constant diameter is let to the second connecting body(15) to insert an internal inducing tube(18) having a smaller diameter than that of the outlet to improve effectively an injection in the injector(14). An induction furnace(24) is installed between the internal inducing tube and an external inducing tube(28) to vaporize the liquid material.