| 摘要 |
PURPOSE: A chamber cooling system is provided to suitably maintain temperature of a chamber by circulating cooling water and interlock operation of drivers in defect of the system. CONSTITUTION: A coolant is implanted into a pipe penetrating an interior of a cooling tube storing a cooling water, circulating the coolant. The system sets up a compressor compressing the coolant and a switch, installed in the back of the compressor, interlocking operation of the compressor when pressure in the tube is higher than a predetermined pressure. The system comprises a motor, a first switch, and a second switch, wherein the motor, mounted in a pump and the cooling tube, performs pulmonary circulation of the cooling water, the first switch performs switching operation to supply power to the pump and the motor according to voltage of a predetermined power supply, and the second switch, coupled to the first switch, performs switching operation to set a level of a signal controlling the chamber.
|
