PHOTORESIST SUPPLYING APPARATUS AND SUPPLYING METHOD

摘要

PURPOSE: An apparatus for supplying a photoresist and method thereof are provided to reduce a waste quantity by reusing the wasted photoresist. CONSTITUTION: A recoverable tank(16) is recovered the wasted photoresist from a buffer tank(12) and a filter(21) and then the supplying of the photoresist is automatically switched from a photoresist supplying source(11) or the buffer tank(12) to the recoverable tank(16). Thereby, the recovered photoresist are reused. After the supplying of the photoresist from the recoverable tank(16) is completed, the photoresist supplying source(11) or the buffer tank(16) is supplied the photoresist. Thereby, it is possible to reduce the waste quantity.