METHOD OF FABRICATING CAPACITOR HAVING BST DIELECTRIC FILM MADE OF LIQUID ORGANOMETALLIC SOURCE

摘要

PURPOSE: A fabricating method of a capacitor having a BST((Ba,Sr)TiO3) dielectric film is provided to improve characteristics of a BST thin film and perform a thin film formation process in a relatively low temperature. CONSTITUTION: The method comprises the steps of forming a lower capacitor electrode; forming a thin film using Ba(C14H25O4), Sr(C14H25O4) and Ti(C6H12O2)(C11H19O2)2 that are liquid organometallic source having similar reactivity and resolvability; and forming an upper electrode on the (Ba,Sr)TiO3 film at a temperature range of 350°C to 500°C.