发明名称 |
SPACING SETTING DEVICE FOR FABRICATING SEMICONDUCTOR |
摘要 |
PURPOSE: A spacing setting device is provided to exactly control a spacing between a mask and a wafer and prevent formation of a groove caused by shock applied to a base. CONSTITUTION: The spacing setting device comprises a control plate whose one end is coupled and fixed to a base; a fine adjustment hand lever flexibly converting the control plate to set a spacing; and a stopper pin coupled to the control plate to limit an amount of variation, wherein a front end of the stopper pin has a plane.
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申请公布号 |
KR20000007322(A) |
申请公布日期 |
2000.02.07 |
申请号 |
KR19980026602 |
申请日期 |
1998.07.02 |
申请人 |
FAIRCHILD KOREA SEMICONDUCTOR LTD. |
发明人 |
HUH, JEONG IL;YOU, WANG HUI |
分类号 |
H01L21/027;(IPC1-7):H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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