发明名称 SPACING SETTING DEVICE FOR FABRICATING SEMICONDUCTOR
摘要 PURPOSE: A spacing setting device is provided to exactly control a spacing between a mask and a wafer and prevent formation of a groove caused by shock applied to a base. CONSTITUTION: The spacing setting device comprises a control plate whose one end is coupled and fixed to a base; a fine adjustment hand lever flexibly converting the control plate to set a spacing; and a stopper pin coupled to the control plate to limit an amount of variation, wherein a front end of the stopper pin has a plane.
申请公布号 KR20000007322(A) 申请公布日期 2000.02.07
申请号 KR19980026602 申请日期 1998.07.02
申请人 FAIRCHILD KOREA SEMICONDUCTOR LTD. 发明人 HUH, JEONG IL;YOU, WANG HUI
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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