COOLING SYSTEM OF SEMICONDUCTOR FABRICATION FACILITY

摘要

PURPOSE: The system improves the endurance and the reparability of a facility by making the cleaning of a cooling line(5) easy by installing a by-pass line(7). CONSTITUTION: The cooling system cools the facility by cycling a cooling water in the cooling line passing through the facility and has a flow meter(6) installed to control the flow the cooling water. The by-pass line detouring the flow meter is installed in the cooling line so that some of the cooling water can flow without going via the flow meter, and a valve opening and shutting the by-pass line by receiving the open/shut signal of a control part(8) is installed in the by-pass line.