发明名称 |
METHOD OF MANUFACTURING A CAPACITIVE ULTRASOUND TRANSDUCER |
摘要 |
An ultrasonic transducer and method of making the same is disclosed comprising applying a sacrificial material to a substrate (20), applying a polymer coating (24) over at least part of the sacrificial layer and the substrate (20), and removing at least part of the sacrificial material to leave a portion of the polymer coating defining a movable member to define a cavity, the polymer coating being applied in the mobile state. The sacrificial material may be removed by providing etch holes in the polymer coating and removing material through the holes. |
申请公布号 |
WO0005001(A1) |
申请公布日期 |
2000.02.03 |
申请号 |
WO1999GB02217 |
申请日期 |
1999.07.23 |
申请人 |
THE SECRETARY OF STATE FOR DEFENCE;NOBLE, RUSSELL;BOZEAT, ROBERT, JOHN |
发明人 |
NOBLE, RUSSELL;BOZEAT, ROBERT, JOHN |
分类号 |
H04R17/00;B06B1/02;G01H11/06;G01S7/521;H04R19/00;H04R31/00 |
主分类号 |
H04R17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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