INSULATED WAVEGUIDE AND SEMICONDUCTOR PRODUCTION EQUIPMENT

摘要

A method for producing an insulated waveguide while suppressing leakage of microwave without causing any trouble in the transmission of microwave and permitting various plasma sources employing a microwave waveguide to be cleaned at high speed, characterized in that at least two waveguides are coupled by a fitting structure through insulation, that the waveguide is provided with a waveguide for forming a standing microwave and a coupling part is located through insulation of at least two waveguides at a position of odd times of a quarter of the wavelength of a microwave in the waveguide from the short-circuitted termination thereof, that the waveguide is further provided with a waveguide for forming a standing microwave, the length of the waveguide being present to be equal to integer times of one half of the wavelength of a microwave in the waveguide, and a coupling part is located through insulation of at least two waveguides at a position of odd times of a quarter of the wavelength of a microwave in the waveguide from the short-circuitted termination thereof.