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发明名称
HALBLEITERVORRICHTUNG UND HERSTELLUNGSVERFAHREN
摘要
申请公布号
DE69420944(T2)
申请公布日期
2000.02.03
申请号
DE19946020944T
申请日期
1994.07.28
申请人
NGK INSULATORS, LTD.
发明人
TERASAWA, YOSHIO
分类号
H01L29/744;H01L21/329;H01L21/332;H01L21/335;H01L29/739;H01L29/74;H01L29/80;(IPC1-7):H01L29/80
主分类号
H01L29/744
代理机构
代理人
主权项
地址
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