Radiation-beam manipulator having a pretensioned thrust bearing

摘要

The invention relates to a radiation-beam manipulator (1) comprising a first part (3) and a second part (7) with a mirror surface (21) which is pivotable relative to the first part about at least one pivot axis (29,31). The manipulator further comprises a system of actuators (35,37,39,41) for pivoting the second part about said pivot axis, said system of actuators comprising a system of electric coils (43,45,47,49) and a system of permanent magnets (51,53,55,57) co-operating with the system of coils. In accordance with the invention, the second part is pivotably journaled relative to the first part by means of a bearing (5,9) comprising a thrust surface (15) and a further bearing part (25) co-operating with said thrust surface, which further bearing part is pretensioned relative to the thrust surface by means of a system of magnetizable elements (59,61,63,65) exerting a magnetic pretension force upon the permanent magnets of the system of actuators parallel to a support axis (67) of the bearing. The magnetizable elements also exert a magnetic torque (Mz) upon said permanent magnets about said support axis. The manipulator is used in a laser-processing device (69) for selectively deflecting a laser beam (93) to a piece of work (75) to be processed. <IMAGE>