| 摘要 |
PROBLEM TO BE SOLVED: To achieve a good ozone yield and the highest possible ozone concentration by arranging a dielectric film of a thermally sprayed ceramic laminated on a supporting member comprising a glass or a glass ceramic, between a pair of electrodes arranged at a discharging gap. SOLUTION: The first electrode 12 composed of Al, Ti, an alloy thereof or the like is formed on the inner surface of a cylindrical supporting member 18 having 1.5-2.1 mm wall thickness and composed of a borosilicate glass or a glass ceramic, and a dielectric substance 16 are laminated on the outer surface by coating a ceramic film 20 by a plasma thermal spraying. The dielectric substance film 20 preferably contains at least one kind of Al2O3, TiO2 and ZrO2, and the ZrO2 is preferably stabilized by Y2o3, MgO, CaO or the like. The thickness of the film is preferably about 20-70μm. The objective ozonizer 10 is composed by arranging the second electrode 14 having a supporting member 24 in the exterior of the dielectric substance at a discharging gap.
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