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发明名称
IMPROVED ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
EP0753200(B1)
申请公布日期
2000.02.02
申请号
EP19940922723
申请日期
1994.07.25
申请人
PHILIPS ELECTRONICS NORTH AMERICA CORPORATION
发明人
KNOWLES, W., RALPH;SCHULTZ, WILLIAM, G.;ARMSTRONG, ALLEN, E.
分类号
H01J37/18;H01J37/22;H01J37/244;H01J37/256;H01J37/28;(IPC1-7):H01J37/256
主分类号
H01J37/18
代理机构
代理人
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