| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an abrasive composition which uses, as abrasive grains, inexpensive iron (III) hydroxide oxide powders capable of improving the productivity in the abrading step and reducing costs by the high-speed abrasive properties while retaining abraded surfaces of high quality. SOLUTION: In the abrasive composition for aluminum disks or metal layers of multi-layered interconnection boards comprising water abrasive grains and an abrasive promoter, the abrasive grains are iron (III) hydroxide oxide powders having a single crystal structure or plural crystal structures selected fromα,β,γandδ-type FeO (OH) crystal structures and a primary particle diameter of 5-500 nm, and the abrasive promoter is a salt to be formed from a trivalent or tetravalent metal and an inorganic acid or an organic acid.</p> |
