| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for minutely detecting defect information such as the more precise number, the positions and the sizes of defects by integrally processing the various defects. SOLUTION: The brightness/darkness defect of an object to be inspected 2 is detected based on brightness/darkness information of picture data, which is obtained by image-picking up the inspected object 2 and picture data is differentiated. Thus, the edge and the fine defect of the inspected object 2 are detected. Then, an integral picture obtained by integrating picture data is differentiated. Thus, the darkness/brightness defect of a low contrast can be detected, the defects are integrally processed and comprehensive information of the defects can be obtained. |
