Stacked showerhead assembly for delivering gases and rf power to a reaction chamber,申请号GB19990027809-传众专利搜索

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发明名称	Stacked showerhead assembly for delivering gases and rf power to a reaction chamber
摘要
申请公布号	GB2339577(A)	申请公布日期	2000.02.02
申请号	GB19990027809	申请日期	1999.04.08
申请人	* TOKYO ELECTRON LIMITED	发明人	JOSEPH T * HILLMAN
分类号	C23C16/505;C23C16/44;C23C16/455;C23C16/509;H01L21/205;H01L21/28;H01L21/285;(IPC1-7):C22C16/00;C23F1/02	主分类号	C23C16/505
代理机构		代理人
主权项
地址

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