发明名称 PROBE WITH MINUTE PROTRUSION AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To improve an S/N ratio and to develop an enhanced light and temperature detection resolution by forming a probe where a plurality of minute protrusions with a gap inside are jointed over a plurality of electrically independent junction layers being formed on a substrate or an elastic body. SOLUTION: A probe with a minute protrusion 5 having its junction interface with two different material layers detects secondary phenomenon where a certain physical phenomenon occurs due to an action at a junction interface and detects the physical phenomenon of light and temperature being detected by the electromotive force of light and heat on the junction interface. The probe is a light-detecting probe where the minute protrusion 5 with two semiconductor layers with different conduction types is mounted on a substrate or an elastic body, and the minute pyramidal protrusion 5 is joined onto the junction layer being formed on the substrate or the like. The protrusion 5 is provided with a gap at an area to the inner substrate. The protrusion 5 is provided with first and second semiconductor layers 51 and 52 with different conductive types, and the layer 51 is joined to a first junction layer 63, and the layer 52 is joined to the second junction layer 64.
申请公布号 JP2000035396(A) 申请公布日期 2000.02.02
申请号 JP19980218505 申请日期 1998.07.16
申请人 CANON INC 发明人 SHIMADA YASUHIRO;YAGI TAKAYUKI;KURODA AKIRA
分类号 G01B7/34;G01B21/30;G01N37/00;G01Q30/02;G01Q60/22;(IPC1-7):G01N13/14 主分类号 G01B7/34
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