| 摘要 |
PROBLEM TO BE SOLVED: To easily facilitate a countermeasure to the high density of the electrode of a member to be inspected, to maintain inspecting precision, and to reduce manufacturing costs. SOLUTION: Resist layers 11 and 12 are formed on the surface and back face of an insulating board 10 as shown in (a), and through-holes 10a are formed at plural plane positions preliminarily decided corresponding to the electrode positions of a member to be inspected in the insulating board 10 as shown in (b). Then, the inside parts of the through-holes 10a and the surfaces of the resist layers 11 and 12 are packed and coated with conductive metallic members 13 in the bored insulating board 10. Moreover, the part of the conductive metallic materials 13 formed on the surface and back faces of the insulating board 10 is removed, and the end faces of the conductive metallic materials packed in the through-holes 10a are worked so as to be made flat as shown in (c). Finally, the resist layers 11 and 12 are removed by etching as shown in (d).
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