| 摘要 |
PROBLEM TO BE SOLVED: To homogeneously form an environmentally resistant coating film on an assembly having a three-dimensionally complicated shape like a thermoelectric module, for example. SOLUTION: A suspended rotary device consisting of an arm 7 which suspends the assembly M to be treated and a rotary pole 6 in a polygon (octagon)-shaped vapor deposition chamber 1 is rotated with a rotary mechanism 5 installed outside. On the other hand, vapor of an organic substance forming the enviromentally resistant coating film is introduced from an introducing hole 2, is discharged as a rotary and spirally ascending current with buffle paltes 3 arranged at proper places from a discharge hole 4, Meantime, the rotational directions of the suspended rotary device and the rotary and spirally ascending current of the vapor are made to be reversed. Thereby bringing the vapor into sufficient contact with the the assembly M to be treated and thus forming the enviromentally resistant coating film on the surface of the assembly to be treated having the three-dimensionally complicated shape.
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