| 摘要 |
PROBLEM TO BE SOLVED: To provide the outward appearance inspecting device which automates transition from macroobservation to microobservation and facilitates the coordinate input of a defective part. SOLUTION: The outward appearance inspecting device is equipped with a macroobservation system, a microobservation system, stages 14 and 15 which are movable in both the observation areas of the macroobservation system and microobservation system, at 1st image input means 22 for fetching an image of the macroobservation system, a 2nd image input means 27 for fetching an image of the microobservation system, and a monitor means 39 which visualizes the inputted images. A position of interest of the image which is fetched by the macroobservation system and displayed is specified by a coordinate specifying means 41, the input coordinates are converted to coordinates on the stages by a stage control means, and a stage controlled variable for moving the position of interest to the optical-axis position of the microobservation system 18.
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