Improved transparent, flexible permeability barrier for organic electroluminescent devices

摘要

A barrier for preventing water or oxygen from a source thereof from reaching a device that is sensitive to water or oxygen. The barrier is constructed by depositing a first polymer layerÄ191Ü between the device and the source. An inorganic layerÄ192Ü is deposited on the first polymer layerÄ191Ü the device by plasma enhanced chemical vapor deposition utilizing an electron cyclotron resonance source ECR-PECVD. A second polymer layerÄ193Ü is then deposited on the inorganic layerÄ192Ü. The inorganic layerÄ192Ü is preferably an oxide or nitride. A second barrier layerÄ201Ü having a compound that absorbs oxygen or water can be placed between the inorganic layerÄ192Ü and the device to further retard the passage of oxygen or water. The present invention is particularly useful in encapsulating electroluminescent displaysÄ100, 203Ü. <IMAGE>