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发明名称
DEVICE AND METHOD FOR PLASMA TREATMENT
摘要
申请公布号
EP0830052(A4)
申请公布日期
2000.02.02
申请号
EP19970908539
申请日期
1997.03.27
申请人
SUMITOMO METAL INDUSTRIES, LTD.
发明人
MABUCHI, HIROSHI;TSUYUGUCHI, JUNYA;KATAYAMA, KATSUO;HAYAMI, TOSHIHIRO;IDA, HIDEO;MURAKAMI, TOMOMI;TAKEDA, NAOHIKO
分类号
B05D7/24;C23C16/44;C23C16/511;H01J37/32;(IPC1-7):H05H1/46;H01L21/205;H01L21/302;C23C16/50;C23F4/00
主分类号
B05D7/24
代理机构
代理人
主权项
地址
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