发明名称 Methods and apparatus for conditioning grinding stones
摘要 <p>The present invention relates generally to a method for conditioning polishing materials that are generally used to polish disks used for magnetic recording. The polishing material is conditioned by moving a conditioning ring relative to the polishing material. More particularly, the conditioning ring is rotated and/or orbited across the surface of the polishing material, so that the material is conditioned. Preferably, the conditioning ring comprises an annular ring of abrasive material fixedly applied to a substantially planar surface of the conditioning ring.</p>
申请公布号 GB9928705(D0) 申请公布日期 2000.02.02
申请号 GB19990028705 申请日期 1998.05.21
申请人 SPEEDFAM-IPEC CORPORATION 发明人
分类号 B24B33/055;B24B37/08;B24B53/017 主分类号 B24B33/055
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