LIQUID-PHASE EPITAXIAL GROWTH MACHINE AND PRODUCTION OF OXIDE SINGLE CRYSTAL FILM

摘要

PROBLEM TO BE SOLVED: To provide a liquid-phase epitaxial growth machine that can give an oxide single crystal film of good properties. SOLUTION: This liquid-phase epitaxial growth machine 10 is equipped with a cylindrical refractory lining 12. A cylindrical heater 14 is arranged on the outside of the refractory lining 12. A crucible-supporting bed 16 is placed inside the refractory lining 12 and a crucible 18 is supported by the supporting bed 16. The center axis of the crucible 18 is deviated from the center axis of the heater 14 by 10 mm. A substrate-rotating shaft 20 is arranged over the crucible and the substrate holder 22 is attached to the lower part of the substrate- rotating shaft 20.