发明名称 PROBE SHARPENING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a probe sharpening method capable of arbitrarily forming the taper angle of the leading end of a probe for STM(scanning tunnel microscope), AFM(atomic force microscope) and SNOM(scanning near field optical microscope). SOLUTION: In a method for producing a probe of which the leading end is sharpened by immersing a part of a probe material 1 in a container 4 containing at least a two-liquid layer containing an etching soln. 2 for the probe material 1 and a non-etching soln. 3 having specific gravity smaller than that of the etching soln. 2 and not mixed with the etching soln. 2, the position in the height direction of the probe material 1 is finely moved during etching to arbitrarily form the taper shape of the leading end of a probe.
申请公布号 JP2000035395(A) 申请公布日期 2000.02.02
申请号 JP19980255270 申请日期 1998.09.09
申请人 SEIKO INSTRUMENTS INC 发明人 MURAMATSU HIROSHI;HONMA KATSUNORI;CHIBA TOKUO;YAMAMOTO NORITAKA;EGAWA AKIRA
分类号 G01N37/00;G01Q60/16;G01Q60/22;G01Q60/38;G01Q70/10;G01Q70/18;(IPC1-7):G01N13/12;G01N13/16;G01N13/14 主分类号 G01N37/00
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