| 摘要 |
PROBLEM TO BE SOLVED: To control dilution gas used in a partial dilution system adopting so-called partial collection in fast response and also with high precision even if it is a large flow rate. SOLUTION: This controller is provided with a 1st channel 33 which makes dilution gas A of a constant flow rate flow regardless of the flow rate fluctuation of exhaust gas G and a piezo valve 43 for controlling the flow rate of the gas A and is parallelly provided with a 2nd channel 34 which adjusts a flow rate in accordance with the flow rate fluctuation of the gas G and makes it flow. Also, the both channels 33 and 34 are joined on the downstream side of the valve 43, a differential pressure type flow meter 6 which detects the flow rate of the gas A flowing in the channel is provided in a 3rd channel 36 provided on the downstream side of this joint 35 and the opening of the valve 43 is adjusted based on a real flow rate detected by the meter 60.
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