ION IMPLANT SYSTEM OF SEMICONDUCTOR DEVICE,申请号KR19960039407-传众专利搜索

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发明名称	ION IMPLANT SYSTEM OF SEMICONDUCTOR DEVICE
摘要
申请公布号	KR100236710(B1)	申请公布日期	2000.02.01
申请号	KR19960039407	申请日期	1996.09.11
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	OH, SANG GUIN;KIM, JEONG GON;NOH, TAE HYO
分类号	C23C14/48;H01J37/30;H01J37/317;H01L21/265;(IPC1-7):H01L21/265	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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