发明名称 Method for manufacturing quartz glass
摘要 A method for manufacturing quartz glass in a flame hydrolysis reaction inside a furnace, including the steps of mixing a gas containing Si, a combustion-supporting gas, and a combustible gas and discharging this mixed gas from a burner; producing a quartz glass powder by causing the mixed and discharged gases to react in a flame within the furnace while an opening area of an opening and shutting system of the furnace is controlled; and producing a quartz glass ingot by depositing and vitrifying the quartz glass powder on a target surface facing an interior of the furnace, wherein said producing step includes the step of controlling the opening area of the opening and shutting system of the furnace in accordance with the amount of growth of the ingot on the target surface.
申请公布号 US6018964(A) 申请公布日期 2000.02.01
申请号 US19980031516 申请日期 1998.02.27
申请人 NIKON CORPORATION 发明人 YAJIMA, SHOUJI;JINBO, HIROKI
分类号 C03B8/04;C03B19/14;C03B20/00;(IPC1-7):C03B5/24;C03B18/18;C03B19/06;C03B37/018;C03B37/07 主分类号 C03B8/04
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