TUNGSTEN CMP METHOD AND APPARATUS THEREFOR,申请号KR19960067620-传众专利搜索

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发明名称	TUNGSTEN CMP METHOD AND APPARATUS THEREFOR
摘要
申请公布号	KR100242461(B1)	申请公布日期	2000.02.01
申请号	KR19960067620	申请日期	1996.12.18
申请人	HYUNDAI ELECTRONICS IND. CO.,LTD	发明人	KANG, JOON MO
分类号	H01L21/304;(IPC1-7):H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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