| 摘要 |
<p>1284613 Splitting TEXAS INSTRUMENTS Inc 15 Oct 1969 [30 Dec 1968] 50707/69 Heading B5E A device for breaking slices of semi-conductor material along scribed lines 12, 13, Fig. 5, comprises a support member 58 for a scribed slice, a force applying member 19 for applying a predetermined force to the upper surface of the slice along a ferrite zone of abutment, means for sensing the applied force and generating a signal proportional thereto and means for moving the support member in a direction perpendicular to the lines and the zone of abutment so as to break the slice along the lines. The slice, which may be 1 inch diameter and 0À007 inch thick has a plurality of bars 11 between the scribe lines, each bar being a semi-conductor component, such as a transistor or integrated circuit. The force applying element 19 consists of a knurled or rubber covered roller 19 rotatably mounted in blocks 21, 22 vertically slidable on posts 48, 49 upstanding from pedestals 16, 17 on a base. Springs 46, 47 act to urge the blocks, and hence the roller towards the base to a position determined by micrometers 23, 24 abutting anvils 42a on the pedestals. A carriage 64 is slidable along a rail 71 disposed between the pedestals and perpendicular to the axis of the roller. A cylindrical housing 63 extends upwardly from the carriage and receives the support member 58 for the slice. The member can be indexed through 90 degrees to position first the scribe lines 12 perpendicular to the axis of the roller and then the scribe lines 13 perpendicular to the axis. The upper surface of the support member is of elastomeric material and incorporates strain gauges which are connected in a bridge circuit and to a circuit which can be adjusted to produce maximum and minimum voltages associated with indicator lamps. With a slice placed on the support member, the member is adjusted so that the first scribe lines are perpendicular to the axis of the roller and the carriage is moved along the rail to feed the slice beneath the roller to break the slice along the scribe lines. Too small or too great a form is indicated by illumination of one of the lamps. Thereafter, the support member is indexed through 90 degrees for breaking of the slice along the second set of scribe lines. The slice is held on the support member by suction applied through holes 104. The slices to be broken may be positioned between sheets of lint free paper or other pliable material and moistened by methanol and water.</p> |
