| 摘要 |
<p>1,236,864. Polishing. SPEEDFAM CORP. 5 Nov., 1969 [15 Nov., 1968], No. 54330/69. Heading B3D. A circular loading plate unit 82 for a polishing machine 10 has an internal chamber 96, 97, means being provided for circulation of fluid through the chamber 96, 97. On circulating hot water, steam, &c., the unit 82 is heated, so that a layer of molten paraffin wax &c., may be spread over a workpiece-engaging surface, and subsequent circulation of cold water solidifies the wax around positioned workpieces 112, adhering them to the unit 82 for transfer to the polishing machine 10. Polishing.-The machine 10 includes a rotary wheel assembly 38 having a polishing cloth 42 mounted on an annular backing wheel 40, an abrasive slurry e.g. of iron oxide, cerium oxide, &c., being supplied through spouts 48. Pneumatically movable piston rods 28 mount spindle assemblies 54, each supporting, through a universal ball bearing 74, a pressure cup 70 having an annular ridge 72 for engaging a corresponding unit 82 bearing adhered workpieces 112. The lower end of each spindle 54 engages through seal assemblies 102 in a central opening 90 of an upper plate 84 of the respective unit 82, and cooling fluid may be supplied through an inlet 62 and passage 58, entering the chamber 96, 97 through radial channels 92 to flow around a baffle plate 98, and discharging through ports 94 to an outlet 68. A collar 80 excludes abrasive slurry &c., from the bearing 74. A workpiece mounting device 120, Fig. 6, comprises a plate assembly 126 for supporting a unit 82 detached from engagement with the spindle 54, having a nose 128 for engaging the seal assemblies 102, fluid inlet and outlet passages 130, 134 being provided in the nose for pressurized fluid circulation.</p> |
