| 摘要 |
PROBLEM TO BE SOLVED: To prevent a transistor in an integrated circuit from being affected by a magnetic field generated by a coil in an inductive sensor in which the coil is arranged on the surface of a semiconductor substrate having an integrated circuit. SOLUTION: Microstructure in an inductive sensor 2 contains an electronic circuit formed of many transistors integrated on a semiconductor substrate 4, and a flat coil 10 which spreads spirally and is formed of a conducting wire 14 of line segments. The transistors 6 and the surface defined by the flat coil 10 overlap with each other. Couples of at least transistors of high sensitivity are arranged in the direction rectangular to the line segments of the conducting wire where the source and the collector of each transistor are arranged adjacently to the above-mentioned transistor.
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