ELECTRON MICROSCOPE WITH MAGNETIC IMAGE FORMING ENERGY FILTER

摘要

PROBLEM TO BE SOLVED: To provide an electron microscope with a magnetic image forming energy filter suitable for forming an energy-filtered object image or a diffraction image in a detector plane and suitable for forming a dispersion plane image in the detector plane for the parallel registration positioning of the energy spectrum. SOLUTION: In this electron microscope with a magnetic image forming energy filter, the energy filter is provided with direction change systems 11-14 arranged symmetrically with one center plane M and a hexapol provided between the direction change systems 11-14 and a projection system succeeding the energy filter in the beam direction.