| 摘要 |
PROBLEM TO BE SOLVED: To provide an IC test handler with a contact transfer for drastically reducing a setting operation by eliminating the troublesome redoing of the mounting of an attachment and the piping of a negative pressure pipe, when changing the fitting position to the attachment of a contactor. SOLUTION: Valve needles J1-J5 project from five contactor-fitting parts being arranged side by side of a contact attachment 50 mounted to the lower end part of a contact arm for constituting a contact transfer in an IC test handler. An accommodation hole A1 for the valve needle J1 communicates with a vacuum source via a air path hole T1, and accommodation holes A2-A5 of valve needles J2-J5 mutually communicate via a side hole manifold M and communicate with another vacuum source via an air path hole T2. When a contactor 70 is fitted to, for example, a third fitting part (the position of the valve needle J3), a blocking taper part (a) of the valve needle J3 leaves an O-ring 64f and a valve is opened, and a peripheral air passage communicating with an IC suction pad 77 and the air path hole T2 communicate each other, thus enabling immediate suction operation of ICs by a contactor 70.
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