| 摘要 |
PROBLEM TO BE SOLVED: To make a device compact, reduce costs, and improve accuracy by changing magnetic flux being given to a coil according to the vibration of a movable part. SOLUTION: In a device, a weight 10, a spring material 11 and a support frame 12 are formed integrally by machining of an Si substrate, a movable part consisting of the spring material 11, and the weight 10 is formed at the center of the Si substrate, and a support frame 12 is formed at the peripheral part of the movable part. Also, one end of the spring material 11 is formed as the weight 10, the other end is connected to the support frame 12 for supporting, and the spring material 11 is separated from the support frame 12 by a feedthrough groove 12a, thus reducing stiffness for the surface direction of a substrate by an etching means from the reverse side. Then, a coil 15 is wound on the surface of the support frame 12 via an insulation layer 14 using a conductive material, and a pad 16 that becomes an output terminal toward the outside is provided at both ends of the coil 15, thus collectively manufacturing the device in quantity, miniaturizing it, reducing its costs, and improving accuracy.
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